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Sub-10-nm Nanogap Fabrication by Silicidation

Bibliographic reference Tang, Xiaohui ; Francis, Laurent ; Dutu, Constantin Augustin ; Reckinger, Nicolas ; Raskin, Jean-Pierre. Sub-10-nm Nanogap Fabrication by Silicidation.13th IEEE International Conference on Nanotechnology 2013 (Beijing (China), du 05/08/2013 au 08/08/2013). In: Proceedings of the 13th IEEE International Conference on Nanotechnology 2013, IEEE2013, p. 570-573
Permanent URL http://hdl.handle.net/2078.1/133894