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A MEMS resonant magnetometer based on capacitive detection

Bibliographic reference Said, M.H. ; Tounsi, F. ; Masmoudi, M. ; Gkotsis, Petros ; Francis, Laurent. A MEMS resonant magnetometer based on capacitive detection.10th International Multi-Conference on Systems, Signals and Devices (SSD 2013) (Hammamet (Tunisia), du 18/03/2013 au 21/03/2013). In: Proceedings of the 10th International Multi-Conference on Systems, Signals and Devices (SSD 2013), IEEE2013, p. 1-5
Permanent URL http://hdl.handle.net/2078.1/133649