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Polyimide as a versatile enabling material for microsystems fabrication: surface micromachining and electrodeposited nanowires integration

Bibliographic reference Walewyns, Thomas ; Reckinger, Nicolas ; Ryelandt, Sophie ; Pardoen, Thomas ; Raskin, Jean-Pierre ; et. al. Polyimide as a versatile enabling material for microsystems fabrication: surface micromachining and electrodeposited nanowires integration. In: Journal of Micromechanics and Microengineering : structures, devices & systems, Vol. 23, no. 9, p. 12 (09/08/2013)
Permanent URL http://hdl.handle.net/2078.1/132898