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Properties of SOI MOSFETs obtained on multilayer buried dielectrics

Bibliographic reference Lysenko, V.S. ; Nazarov, Alexei ; Rudenko, Tamara ; Rudenko, A.N. ; Kilchytska, Valeriya ; et. al. Properties of SOI MOSFETs obtained on multilayer buried dielectrics.6th International Electrochemical Society meeting and Symposium on "Silicon-on-Insulator Technology and Devices" (San Francisco (USA), du 22/05/1994 au 27/05/1994). In: Proceedings of the 6th International Electrochemical Society meeting and Symposium on "Silicon-on-Insulator Technology and Devices", 1994, p. 483
Permanent URL http://hdl.handle.net/2078.1/132855