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Thermal polarization and depolarization processes in BOX of SOI SIMOX structures

Bibliographic reference Nazarov, Alexei ; Barchuk, I.P. ; Kilchytska, Valeriya. Thermal polarization and depolarization processes in BOX of SOI SIMOX structures.International Electrochemical Society meeting and Symposium on "Silicon-on-Insulator Technology and Devices" (Los Angeles (USA), du 05/05/1996 au 10/05/1996). In: Proceedings of the 7th International Electrochemical Society meeting and Symposium on "Silicon-on-Insulator Technology and Devices", P.L.F.Hemment1996, p.302-310
Permanent URL http://hdl.handle.net/2078.1/132844