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Thermally activated processes in the buried oxide of SIMOX SOI structures and devices

Bibliographic reference Lysenco, V.S ; Nazarov, Alexei ; Kilchytska, Valeriya ; Osijuk, I.P. ; Tyagulski, P. ; et. al. Thermally activated processes in the buried oxide of SIMOX SOI structures and devices. In: Solid-State Electronics, Vol. 45, no.4, p. 575-584 (April 2001)
Permanent URL http://hdl.handle.net/2078.1/132824