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Effect of ionizing irradiation on electrical properties of buried multilayer dielectrics of SOI structures, obtained by ZMR technique

Bibliographic reference Vovk, Ya.N. ; Barchuk, I.P. ; Kilchytska, Valeriya ; Lysenko , V.S. ; Nazarov, Alexei ; et. al. Effect of ionizing irradiation on electrical properties of buried multilayer dielectrics of SOI structures, obtained by ZMR technique. In: Mikroelectronika, Vol. 25, no.5, p. 346-353 (1996)
Permanent URL http://hdl.handle.net/2078.1/132761