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Micro-electro-mechanical testing of freestanding ultrathin aluminum oxide films

Bibliographic reference van der Rest, Astrid ; Van Overmeere, Quentin ; Henry, Frédéric ; Proost, Joris ; Pardoen, Thomas. Micro-electro-mechanical testing of freestanding ultrathin aluminum oxide films.2013 Fall Meeting of the Materials Research Society - Symposium on Microelectromechanical Systems-Materials and Devices (Boston, USA, du 01/12/2013 au 06/12/2013). In: Proceedings of the 2013 Fall Meeting of the Materials Research Society, 2013, p.Abstract XX.10.07
Permanent URL http://hdl.handle.net/2078.1/131938