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RF plasma annealing of the positive charge created by Fowler-Nordheim electron injection in buried oxide of SIMOX SOI structure

Bibliographic reference Nazarov, Alexei ; Kilchytska, Valeriya ; Barchuk, I.P. ; Tkachenko, A.S. ; Ashok, S.. RF plasma annealing of the positive charge created by Fowler-Nordheim electron injection in buried oxide of SIMOX SOI structure. In: Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 18, no.3, p. 1156-1164 (2000)
Permanent URL http://hdl.handle.net/2078.1/131438