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Fabrication, characterization and self-consistent simulation of SOI nano flash memory device

Bibliographic reference Tang, Xiaohui ; Baie, Xavier ; Bayot, Vincent ; Van de Wiele, Fernand ; Colinge, Jean-Pierre. Fabrication, characterization and self-consistent simulation of SOI nano flash memory device.IEEE International Electron Devices Meeting (IEDM 1999) (Washington (USA), du 05/12/1999 au 08/12/1999). In: International Electron Devices Meeting 1999, IEDM technical digest, Institute of Electrical & Electronics Engineers : Piscataway2000, p. 919
Permanent URL http://hdl.handle.net/2078.1/130162