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Fabrication of a Self-Aligned SOI Nano Flash Memory Device

Bibliographic reference Tang, Xiaohui ; Baie, Xavier ; Colinge, Jean-Pierre ; Van de Wiele, Fernand ; Bayot, Vincent. Fabrication of a Self-Aligned SOI Nano Flash Memory Device.199th Meeting of the Electrochemical Society 2001 (Washington (USA), du 26/03/2001 au 28/03/2001). In: Meeting abstracts of the 199th Meeting of the Electrochemical Society 2001, 2001
Permanent URL http://hdl.handle.net/2078.1/130133