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Issues associated to rare earth silicide integration in ultra thin FD SOI Schottky barrier nMOSFETs

Bibliographic reference Larrieu, Guilhem ; Yarekha, Dmitro A. ; Dubois, Emmanuel ; Breil, Nicolas ; Reckinger, Nicolas ; et. al. Issues associated to rare earth silicide integration in ultra thin FD SOI Schottky barrier nMOSFETs. In: ECS Transactions, Vol. 19, no. 4, p. 201-207 (2009)
Permanent URL http://hdl.handle.net/2078.1/130055