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In situ monitoring of electrostriction in anodic and thermal silicon dioxide thin films

Bibliographic reference Blaffart, Frédéric ; Van Overmeere, Quentin ; Pardoen, Thomas ; Proost, Joris. In situ monitoring of electrostriction in anodic and thermal silicon dioxide thin films. In: Journal of Solid State Electrochemistry : current research and development in science and technology, Vol. 17, p. 1945-1954 (February 2013)
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  1. Clark K. B., Bardwell J. A., Baribeau J.‐M., Physical characterization of ultrathin anodic silicon oxide films, 10.1063/1.357493
  2. Ohnishi Kazunori, Ito Akira, Takahashi Yoshihiro, Miyazaki Syunsuke, Growth and Characterization of Anodic Oxidized Films in Pure Water, 10.1143/jjap.41.1235
  3. Nadji B (2005) Proc of the IEEE Int Conf on Electron circuits and Syst 4633523
  4. Endler S, Hoang T, Angelopoulos EA, Rempp H, Harendt C, Burghartz JN (2011) IEEE Semicond Conf Dresden 6068727
  5. Sverdlov Viktor, Strain-Induced Effects in Advanced MOSFETs, ISBN:9783709103814, 10.1007/978-3-7091-0382-1
  6. Morin P (2006) 14th IEEE Int Conf on Adv Therm Process of Semicond 4223114: 93–102
  7. Suhling JC, Carey MT, Johnson RW, Jaeger RC (1991) Am Soc Mech Eng Appl Mech Div 131:143–152
  8. Decker F, Pantano E, Dini D, Cattarin S, Maffi S, Razzini G, Use of the bending-beam-method for the study of the anodic oxidation of Si in dilute fluoride media, 10.1016/s0013-4686(00)00612-5
  9. Lehmann V., On the Origin of Electrochemical Oscillations at Silicon Electrodes, 10.1149/1.1836636
  10. Grzanna Jürgen, Notz Thilo, Lewerenz Hans-J., Stress induced one-dimensional model for current oscillations at the Si/electrolyte contact, 10.1002/pssc.200881028
  11. Uchino Kenji, Nomura Shoichiro, Cross Leslie E., Newnham Robert E., Jang Sei J., Electrostrictive effect in perovskites and its transducer applications, 10.1007/bf02402772
  12. Zhao Xuanhe, Suo Zhigang, Electrostriction in elastic dielectrics undergoing large deformation, 10.1063/1.3031483
  13. Shkel Yuri M., Klingenberg Daniel J., Electrostriction of polarizable materials: Comparison of models with experimental data, 10.1063/1.367958
  14. Lee Ho Young, Peng Yiyan, Shkel Yuri M., Strain-dielectric response of dielectrics as foundation for electrostriction stresses, 10.1063/1.2073977
  15. Pelrine R., High-Speed Electrically Actuated Elastomers with Strain Greater Than 100%, 10.1126/science.287.5454.836
  16. Van Overmeere Q., Blaffart F., La Mantia F., Di Quarto F., Proost J., Electromechanical coupling in anodic niobium oxide: Electric field-induced strain, internal stress, and dielectric response, 10.1063/1.4729319
  17. Matthews C. G., Optical Anisotropy and Electrostriction in the Anodic Oxide of Niobium, 10.1149/1.2119695
  18. Vanhumbeeck J.-F., Proost J., On the contribution of electrostriction to charge-induced stresses in anodic oxide films, 10.1016/j.electacta.2007.11.028
  19. Van Overmeere Q., Vanhumbeeck J.-F., Proost J., On the use of a multiple beam optical sensor for in situ curvature monitoring in liquids, 10.1063/1.3385432
  20. Janssen G.C.A.M., Abdalla M.M., van Keulen F., Pujada B.R., van Venrooy B., Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers, 10.1016/j.tsf.2008.07.014
  21. Vanhumbeeck JF (2009) Ph.D. Thesis (p. 26), Ecole Polytechnique de Louvain.
  22. A. Irene Eugene, Ultra-thin SiO2 film studies: index, thickness, roughness and the initial oxidation regime, 10.1016/s0038-1101(00)00258-6
  23. Lewerenz H.J., Anodic oxides on silicon, 10.1016/0013-4686(92)85037-l
  24. Van Overmeere Q., Proost J., Stress-affected and stress-affecting instabilities during the growth of anodic oxide films, 10.1016/j.electacta.2011.03.123
  25. Rzodkiewicz W, Panas A, Application of spectroscopic ellipsometry for investigations of compaction and decompaction state in Si-SiO2systems, 10.1088/1742-6596/181/1/012035
  26. Robertson J., High dielectric constant oxides, 10.1051/epjap:2004206
  27. Schmuki P., In Situ Characterization of Anodic Silicon Oxide Films by AC Impedance Measurements, 10.1149/1.2048644
  28. Parkhutik V.P., Kinetics, composition and mechanism of anodic oxide growth on silicon in water-containing electrolytes, 10.1016/0013-4686(91)85014-x