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Direct transcription of two-dimensional colloidal crystalarrays into three-dimensional photonic crystals.

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Vlad, Alexandru [UCL] Frölich, Andreas [Karlsruhe Institute of Technology (KIT), Germany] Zebrowski, Thomas [Karlsruhe Institute of Technology (KIT), Germany] Dutu, Constantin Augustin [UCL] Busch, Kurt [Humboldt Universität zu Berlin, Germany] Melinte, Sorin [UCL] Huynen, Isabelle [UCL]

A simple protocol for the fabrication of three-dimensional (3D) photonic crystals in silicon is presented. Surface structuring by nanosphere lithography is merged with a novel silicon etching method to fabricate ordered 3D architectures. The SPRIE method, sequential passivation reactive ion etching, is a one-step processing protocol relying on sequential passivation and reactive ion etching reactions using C 4 F 8 and SF 6 plasma chemistries. The diffusion of fresh reactants and etch product species inside the etched channels is found to play an important role affecting the structural uniformity of the designed structures and the etch rate drift is corrected by adjusting the reaction times. High quality photonic crystals are thus obtained by adding the third dimension to the two-dimensional (2D) colloidal crystal assemblies through SPRIE. Careful adjustments of both mask design and lateral etch extent balance allow the implementation of even more complex functionalities including photonic crystal slabs and precise defect engineering. 3D photonic crystal lattices exhibiting optical stop-bands in the infrared spectral region are demonstrated, proving the potential of SPRIE for fast, simple, and large-scale fabrication of photonic structures.

Document type Article de périodique (Journal article) – Article de recherche
Access type Accès libre
Publication date 2013
Language Anglais
Journal information "Advanced Functional Materials" - Vol. 23, no. 1, p. 1164–1171 (2013)
Peer reviewed yes
Publisher Wiley - V C H Verlag GmbH & Co. KGaA ((Germany) Weinheim)
issn 1616-301X
e-issn 1616-3028
Publication status Publié
Affiliation UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique
Keywords NANO
Links
  1. Kim Shin-Hyun, Lee Su Yeon, Yang Seung-Man, Yi Gi-Ra, Self-assembled colloidal structures for photonics, 10.1038/asiamat.2010.192
  2. Galisteo-López Juan F., Ibisate Marta, Sapienza Riccardo, Froufe-Pérez Luis S., Blanco Álvaro, López Cefe, Self-Assembled Photonic Structures, 10.1002/adma.201000356
  3. Hynninen Antti-Pekka, Thijssen Job H. J., Vermolen Esther C. M., Dijkstra Marjolein, van Blaaderen Alfons, Self-assembly route for photonic crystals with a bandgap in the visible region, 10.1038/nmat1841
  4. Soukoulis, Nat. Photonics, 5, 523 (2011)
  5. Aricò Antonino Salvatore, Bruce Peter, Scrosati Bruno, Tarascon Jean-Marie, van Schalkwijk Walter, Nanostructured materials for advanced energy conversion and storage devices, 10.1038/nmat1368
  6. Konstantatos Gerasimos, Sargent Edward H., Nanostructured materials for photon detection, 10.1038/nnano.2010.78
  7. Joannopoulos, Photonic Crystals: Molding the Flow of Light (2nd Ed.) (2008)
  8. Schuller Jon A., Barnard Edward S., Cai Wenshan, Jun Young Chul, White Justin S., Brongersma Mark L., Plasmonics for extreme light concentration and manipulation, 10.1038/nmat2630
  9. Marlow Frank, Muldarisnur, Sharifi Parvin, Brinkmann Rainer, Mendive Cecilia, Opals: Status and Prospects, 10.1002/anie.200900210
  10. Stein Andreas, Li Fan, Denny Nicholas R., Morphological Control in Colloidal Crystal Templating of Inverse Opals, Hierarchical Structures, and Shaped Particles†, 10.1021/cm702107n
  11. Diacon Aurel, Rusen Edina, Mocanu Alexandra, Hudhomme Piétrick, Cincu Corneliu, Fluorescence Properties of Photonic Crystals Doped with Perylenediimide, 10.1021/la200878b
  12. Ding Tao, Song Kai, Clays Koen, Tung Chen-Ho, Controlled Directionality of Ellipsoids in Monolayer and Multilayer Colloidal Crystals, 10.1021/la101622d
  13. Hosein Ian D., Lee Stephanie H., Liddell Chekesha M., Dimer-Based Three-Dimensional Photonic Crystals, 10.1002/adfm.201000134
  14. Rinne Stephanie A., García-Santamaría Florencio, Braun Paul V., Embedded cavities and waveguides in three-dimensional silicon photonic crystals, 10.1038/nphoton.2007.252
  15. Aparicio Francisco J., Lozano Gabriel, Blaszczyk-Lezak Iwona, Barranco Ángel, Míguez Hernán, Conformal Growth of Organic Luminescent Planar Defects within Artificial Opals, 10.1021/cm902819x
  16. Qi Minghao, Lidorikis Elefterios, Rakich Peter T., Johnson Steven G., Joannopoulos J. D., Ippen Erich P., Smith Henry I., A three-dimensional optical photonic crystal with designed point defects, 10.1038/nature02575
  17. Deubel Markus, von Freymann Georg, Wegener Martin, Pereira Suresh, Busch Kurt, Soukoulis Costas M., Direct laser writing of three-dimensional photonic-crystal templates for telecommunications, 10.1038/nmat1155
  18. von Freymann Georg, Ledermann Alexandra, Thiel Michael, Staude Isabelle, Essig Sabine, Busch Kurt, Wegener Martin, Three-Dimensional Nanostructures for Photonics, 10.1002/adfm.200901838
  19. Turberfield A. J., Campbell M., Sharp D. N., Harrison M. T., Denning R. G., 10.1038/35003523
  20. Jeon S., Park J.-U., Cirelli R., Yang S., Heitzman C. E., Braun P. V., Kenis P. J. A., Rogers J. A., Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks, 10.1073/pnas.0403048101
  21. Chang C.-H., Tian L., Hesse W. R., Gao H., Choi H. J., Kim J.-G., Siddiqui M., Barbastathis G., From Two-Dimensional Colloidal Self-Assembly to Three-Dimensional Nanolithography, 10.1021/nl2011824
  22. Vlad Alexandru, Dutu Constantin Augustin, Guillet Pierre, Jedrasik Piotr, Fustin Charles-André, Södervall Ulf, Gohy Jean-François, Melinte Sorin, Highly Ordered Conjugated Polymer Nanoarchitectures with Three-Dimensional Structural Control, 10.1021/nl9008937
  23. Staude I., von Freymann G., Essig S., Busch K., Wegener M., Waveguides in three-dimensional photonic-bandgap materials by direct laser writing and silicon double inversion, 10.1364/ol.36.000067
  24. Wong S., Deubel M., Pérez-Willard F., John S., Ozin G. A., Wegener M., von Freymann G., Direct Laser Writing of Three- Dimensional Photonic Crystals with a Complete Photonic Bandgap in Chalcogenide Glasses, 10.1002/adma.200501973
  25. Schilling J., Müller F., Matthias S., Wehrspohn R. B., Gösele U., Busch K., Three-dimensional photonic crystals based on macroporous silicon with modulated pore diameter, 10.1063/1.1351533
  26. Takahashi Shigeki, Suzuki Katsuyoshi, Okano Makoto, Imada Masahiro, Nakamori Takeshi, Ota Yuji, Ishizaki Kenji, Noda Susumu, Direct creation of three-dimensional photonic crystals by a top-down approach, 10.1038/nmat2507
  27. van den Broek J. M., Woldering L. A., Tjerkstra R. W., Segerink F. B., Setija I. D., Vos W. L., Inverse-Woodpile Photonic Band Gap Crystals with a Cubic Diamond-like Structure Made from Single-Crystalline Silicon, 10.1002/adfm.201101101
  28. Zhang Junhu, Li Yunfeng, Zhang Xuemin, Yang Bai, Colloidal Self-Assembly Meets Nanofabrication: From Two-Dimensional Colloidal Crystals to Nanostructure Arrays, 10.1002/adma.201000755
  29. Lee Sin Young, Gradon Leon, Janeczko Stanislaw, Iskandar Ferry, Okuyama Kikuo, Formation of Highly Ordered Nanostructures by Drying Micrometer Colloidal Droplets, 10.1021/nn101297c
  30. Vlad Alexandru, Huynen Isabelle, Melinte Sorin, Wavelength-scale lens microscopy via thermal reshaping of colloidal particles, 10.1088/0957-4484/23/28/285708
  31. Vlasov Yurii A., Bo Xiang-Zheng, Sturm James C., Norris David J., On-chip natural assembly of silicon photonic bandgap crystals, 10.1038/35104529
  32. Jones Matthew R., Osberg Kyle D., Macfarlane Robert J., Langille Mark R., Mirkin Chad A., Templated Techniques for the Synthesis and Assembly of Plasmonic Nanostructures, 10.1021/cr1004452
  33. Venkataraman Sriram, Schneider Garrett J., Murakowski Janusz, Shi Shouyuan, Prather Dennis W., Fabrication of three-dimensional photonic crystalsusing silicon micromachining, 10.1063/1.1790594
  34. F. Laermer A. Schilp U.S. Patent No. 5501893 1996
  35. Wu Banqiu, Kumar Ajay, Pamarthy Sharma, High aspect ratio silicon etch: A review, 10.1063/1.3474652
  36. Zhang Ting, Qian Jun, Tuo Xinlin, Yuan Jun, Selective Fusion, Solvent Dissolution, and Local Symmetry Effects in Inversion of Colloidal Crystals to Ordered Porous Films, 10.1021/la903158z
  37. Kosiorek A., Kandulski W., Chudzinski P., Kempa K., Giersig M., Shadow Nanosphere Lithography:  Simulation and Experiment, 10.1021/nl049361t
  38. Busch K., von Freymann G., Linden S., Mingaleev S.F., Tkeshelashvili L., Wegener M., Periodic nanostructures for photonics, 10.1016/j.physrep.2007.02.011
Bibliographic reference Vlad, Alexandru ; Frölich, Andreas ; Zebrowski, Thomas ; Dutu, Constantin Augustin ; Busch, Kurt ; et. al. Direct transcription of two-dimensional colloidal crystalarrays into three-dimensional photonic crystals.. In: Advanced Functional Materials, Vol. 23, no. 1, p. 1164–1171 (2013)
Permanent URL http://hdl.handle.net/2078/126937