User menu

Modeling the sensing behavior of a MEMS field ionization device coupled with capacitive actuation

Bibliographic reference Walewyns, Thomas ; Francis, Laurent. Modeling the sensing behavior of a MEMS field ionization device coupled with capacitive actuation.2012 IEEE Sensors Conference (Taipei (Taiwan), du 28/10/2012 au 31/10/2012). In: Proceedings of the 2012 IEEE Sensors Conference, IEEE2012, p. 4
Permanent URL http://hdl.handle.net/2078.1/124445