Ultra-Thin Silicon Strip Detectors for Hadrontherapy Beam Monitoring

Hadrontherapy has gained increasing interest for cancer treatment especially within the last decade [1]. For precise treatment purposes, the hadron beam has to be monitored in real-time without being degraded [2]. For the first time and thanks to thick-SOI wafers, silicon strip detectors have been fabricated over an area as large as 20.25cm2 with ultra low thickness of 20μm and 10μm in order to reduce the beam scattering as simulated in [2]. In this work, we briefly describe the fabrication process and present the first electrical characterizations compared to the application requirements. These novel fabricated devices constitute a very promising technology for future hadrontherapy beam monitoring.