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On-chip testing of (freestanding) thin films

Bibliographic reference Pardoen, Thomas ; Coulombier, Michaël ; Colla, Marie-Stéphane ; Bhaskar, Umesh Kumar ; Passi, Vikram ; et. al. On-chip testing of (freestanding) thin films.Indentation 2012 (Ecully, France, du 29/10/2012 au 31/10/2012). In: Proceedings of the Indentation 2012, 2012, p. Paper 1
Permanent URL http://hdl.handle.net/2078/123764