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Sensing and MEMS devices in thin film SOI MOS technology

Bibliographic reference Raskin, Jean-Pierre. Sensing and MEMS devices in thin film SOI MOS technology.2nd Annual Congress of Nano-S&T – Nano S&T-2012 (Qingdao, China, du 26/10/2012 au 28/10/2012). In: Proceedings of the 2nd Annual Congress of Nano-S&T – Nano S&T-2012, 2012, p. 64
Permanent URL http://hdl.handle.net/2078/123760