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Polyimide as versatile enabling material for microsystems fabrication: electrodeposited nanowires integration and surface micromachining

Bibliographic reference Walewyns, Thomas ; Reckinger, Nicolas ; Ryelandt, Sophie ; Pardoen, Thomas ; Raskin, Jean-Pierre ; et. al. Polyimide as versatile enabling material for microsystems fabrication: electrodeposited nanowires integration and surface micromachining.5ème Colloque du Laboratoire International Associé “Nanotechnologies & Nanosystèmes (Orford (Québec), du 15/07/2012 au 18/07/2012). In: Proceedings du 5ème Colloque du Laboratoire International Associé “Nanotechnologies & Nanosystèmes, 2012, p. 103 - Paper GE21
Permanent URL http://hdl.handle.net/2078/123674