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The fracture of polycrystalline silicon based MEMS

Bibliographic reference Wang, X. ; Becker, G. ; Ling, Wu ; Pardoen, Thomas ; Raskin, Jean-Pierre ; et. al. The fracture of polycrystalline silicon based MEMS.13th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE 2012 (Lisbon, Portugal, du 16/04/2012 au 18/04/2012). In: Proceedings of the 13th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE 2012, 2012
Permanent URL http://hdl.handle.net/2078/123670