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Surface roughness characterisation of strained silicon structures using AFM

Bibliographic reference Urena, F. ; Raskin, Jean-Pierre ; Olsen, S.H.. Surface roughness characterisation of strained silicon structures using AFM.The 14th edition of the Annual Research Conference – ARC’12 (Newcastle, UK, du 25/01/2012 au 26/01/2012). In: Proceedings of the The 14th edition of the Annual Research Conference – ARC’12, 2012, p. 23
Permanent URL http://hdl.handle.net/2078/123602