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Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures
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| Document type | Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection |
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| Publication date | 2009 |
| Language | Anglais |
| Conference | "Workshop on Templated Self-Organization: processing, characterization and modeling", Stuttgart (Germany) (du 25/06/2009 au 26/06/2009) |
| Peer reviewed | yes |
| Host document | "Proceedings of the Workshop on Templated Self-Organization: processing, characterization and modeling" |
| Publication status | Publié |
| Affiliation | UCL - FSA/ELEC - Département d'électricité |
| Links |
| Bibliographic reference | Tang, Xiaohui ; Ravau, F. ; Dubois, E. ; Kasper, E. ; Karmous, A. ; et. al. Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures.Workshop on Templated Self-Organization: processing, characterization and modeling (Stuttgart (Germany), du 25/06/2009 au 26/06/2009). In: Proceedings of the Workshop on Templated Self-Organization: processing, characterization and modeling, 2009 |
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| Permanent URL | http://hdl.handle.net/2078.1/123509 |