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On-wafer stress tuning of MEMS resonators

Bibliographic reference Houri, Samer ; Francis, Laurent ; Raskin, Jean-Pierre. On-wafer stress tuning of MEMS resonators.19th MicroMechanics Europe Workshop - MME’08 (Aachen (Germany), du 28/09/2008 au 30/09/2008). In: Proceedings of the 19th MicroMechanics Europe Workshop - MME’08, 2008, p.pp. 287-290
Permanent URL http://hdl.handle.net/2078.1/123506