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Wide frequency tuning range of MEMS resonators through on-wafer uniaxial stress

Bibliographic reference Houri, Samer ; Francis, Laurent ; Raskin, Jean-Pierre. Wide frequency tuning range of MEMS resonators through on-wafer uniaxial stress.34th International Conference on Micro- and Nano-Engineering - MNE 2008 (Athens (Greece), du 15/09/2008 au 18/09/2008). In: Proceedings of the 34th International Conference on Micro- and Nano-Engineering - MNE 2008, 2008, p. 366 - Paper MEMS3-P15
Permanent URL http://hdl.handle.net/2078.1/123504