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SOI co-integrated microsensors

Bibliographic reference Olbrechts, Benoit ; André, Nicolas ; Rue, Bertrand ; Flandre, Denis ; Raskin, Jean-Pierre. SOI co-integrated microsensors.7th MEMUNITY - The MEMS Test Community - Workshop (Eindhoven, The Netherlands, du 23/10/2007 au 24/10/2007). In: Proceedings of the 7th MEMUNITY - The MEMS Test Community - Workshop, 2007, p.Paper 10
Permanent URL http://hdl.handle.net/2078.1/123405