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Comparison of High-Resistivity Silicon Surface Passivation Methods

Bibliographic reference Norling, M. ; Kuylenstierna, D. ; Vorobiev, A. ; Reimann, K. ; Lederer, Dimitri ; et. al. Comparison of High-Resistivity Silicon Surface Passivation Methods.European Microwave Integrated Circuit Conference - EuMIC 2007 (Munich, Germany, du 08/10/2007 au 12/10/2007). In: Proceedings of the European Microwave Integrated Circuit Conference - EuMIC 2007, IEEE2007, p.pp. 215-218
Permanent URL http://hdl.handle.net/2078.1/123403