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Metallic Source/Drain architecture: status and prospects

Bibliographic reference Dubois, E. ; Larrieu, G. ; Breil, N. ; Valentin, R. ; Danneville, E. ; et. al. Metallic Source/Drain architecture: status and prospects.37th European Solid-State Device Research Conference – ESSDERC 2007, SINANO Workshop entitled : Nanoscale CMOS and Beyond-CMOS Nanodevices (Munich (Germany), 14/09/2007). In: Proceedings of the 37th European Solid-State Device Research Conference – ESSDERC 2007, SINANO Workshop entitled : Nanoscale CMOS and Beyond-CMOS Nanodevices, 2007, p. Paper 2
Permanent URL http://hdl.handle.net/2078.1/123300