El Ghorba, Mehdi
[UCL]
André, Nicolas
[UCL]
Sobieski, Stanislas
[UCL]
Raskin, Jean-Pierre
[UCL]
Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in DeltaV changes thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. Ferromagnetic nickel plates also show 20 mum- vertical deflection in magnetic field non-aligned with the residual magnetization.
Bibliographic reference |
El Ghorba, Mehdi ; André, Nicolas ; Sobieski, Stanislas ; Raskin, Jean-Pierre. CMOS Compatible Out-of-Plane & In-Plane Integrated Magnetometer.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007 (Stresa, Lago Maggiore, Italy, du 25/04/2007 au 27/04/2007). In: Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, 2007, p.pp. 221-224 |
Permanent URL |
http://hdl.handle.net/2078.1/123290 |