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CMOS Compatible Out-of-Plane & In-Plane Integrated Magnetometer

Bibliographic reference El Ghorba, Mehdi ; André, Nicolas ; Sobieski, Stanislas ; Raskin, Jean-Pierre. CMOS Compatible Out-of-Plane & In-Plane Integrated Magnetometer.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007 (Stresa, Lago Maggiore, Italy, du 25/04/2007 au 27/04/2007). In: Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, 2007, p.pp. 221-224
Permanent URL http://hdl.handle.net/2078.1/123290