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CMOS compatible 3-D MEMS in SOI technology

Bibliographic reference André, Nicolas ; Iker, François ; Raskin, Jean-Pierre. CMOS compatible 3-D MEMS in SOI technology.Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits – EuroSOI’07 (Leuven, Belgium, du 24/01/2007 au 26/01/2007). In: Proceedings of the Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits – EuroSOI’07, 2007, p.pp. 69-70
Permanent URL http://hdl.handle.net/2078.1/123286