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Fabrication of a Quadruple Gate MOSFET in Silicon-on-Insulator technology

Bibliographic reference Passi, Vikram ; Olbrechts, Benoit ; Raskin, Jean-Pierre. Fabrication of a Quadruple Gate MOSFET in Silicon-on-Insulator technology.Advanced Research Workshop “Nanoscaled Semiconductor-on-Insulator structures and devices (Sudak, Crimea, Ukraine, du 15/10/2006 au 19/10/2006). In: Proceedings of the Advanced Research Workshop “Nanoscaled Semiconductor-on-Insulator structures and devices, 2006, p.pp. 11-12
Permanent URL http://hdl.handle.net/2078.1/123253