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Modeling of the fabrication and operation of 3-D self assembled SOI MEMS

Bibliographic reference Méndez, C. ; De Vincenzo, P. ; Klapka, I. ; Rochus, V. ; Iker, François ; et. al. Modeling of the fabrication and operation of 3-D self assembled SOI MEMS.EuroSIME 2006 – Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and micro-systems (Milano, Italy, du 23/04/2006 au 26/04/2006). In: Proceedings of the EuroSIME 2006 – Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and micro-systems, 2006, p.pp. 406-410
Permanent URL http://hdl.handle.net/2078.1/123214