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Planar Double-Gate SOI MOS devices by wafer bonding over pre-patterned cavities

Bibliographic reference Chung, Tsung Ming ; Olbrechts, Benoit ; Flandre, Denis ; Södervall, U. ; Bengtsson, S. ; et. al. Planar Double-Gate SOI MOS devices by wafer bonding over pre-patterned cavities.Second Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits – EuroSOI’05 (Grenoble, France, du 08/03/2006 au 10/03/2006). In: Proceedings of the Second Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits – EuroSOI’05, 2006, p.pp. 111-112
Permanent URL http://hdl.handle.net/2078.1/123213