User menu

Three-dimensional microsystems co-integrated with SOI-CMOS circuit technology: from MEMS to NEMS

Bibliographic reference Iker, François ; André, Nicolas ; Raskin, Jean-Pierre. Three-dimensional microsystems co-integrated with SOI-CMOS circuit technology: from MEMS to NEMS.IEEE International Conference on Nano/Micro Egineered and Molecular Systems (Zhuhai, China, du 18/01/2006 au 21/01/2006). In: Proceedings of the IEEE International Conference on Nano/Micro Egineered and Molecular Systems, 2006, p. Session 3E4.1-Paper 362
Permanent URL http://hdl.handle.net/2078.1/123209