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Enhanced high resistivity SOI wafers for RF applications

Bibliographic reference Lederer, Dimitri ; Lobet, Romuald ; Raskin, Jean-Pierre. Enhanced high resistivity SOI wafers for RF applications.2004 IEEE International SOI Conference (Charleston, South Carolina, USA, du 04/10/2004 au 07/10/2004). In: Proceedings of the 2004 IEEE International SOI Conference, 2004, p.pp. 46-47
Permanent URL http://hdl.handle.net/2078.1/123033