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Microelectromechanical Systems: from microfabrication techniques to smart sensors

Bibliographic reference Raskin, Jean-Pierre. Microelectromechanical Systems: from microfabrication techniques to smart sensors. In: Belgian Journal of Electronics & Communications, , no.2, p. 2-8 (July 2001)
Permanent URL http://hdl.handle.net/2078.1/122087