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High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires

Bibliographic reference Passi, Vikram ; Bhaskar, Umesh Kumar ; Pardoen, Thomas ; Sodervall, Ulf ; Nilsson, Bengt ; et. al. High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires. In: IEEE Journal of Microelectromechanical Systems, Vol. 21, no.4, p. 822-829 (August 2012)
Permanent URL http://hdl.handle.net/2078.1/121256