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Experimental observations of surface roughness in uniaxially loaded strained Si microelectromechanical systems-based structures

Bibliographic reference Escobedo-Cousin, Enrique ; Olsen, Sarah H. ; Pardoen, Thomas ; Bhaskar, Umesh Kumar ; Raskin, Jean-Pierre. Experimental observations of surface roughness in uniaxially loaded strained Si microelectromechanical systems-based structures. In: Applied Physics Letters, Vol. 99, p. 241906 (2011)
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