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On-chip tensile testing of nanoscale silicon free-standing beams

Bibliographic reference Bhaskar, Umesh Kumar ; Passi, Vikram ; Houri, Samer ; Escobedo-Cousin, Enrique ; Olsen, Sarah H. ; et. al. On-chip tensile testing of nanoscale silicon free-standing beams. In: Journal of Materials Research, Vol. 27, no. 3, p. 571-579 (Feb. 2012)
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