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A novel approach for active pressure sensors in thin film SOI technology

Bibliographic reference Olbrechts, Benoit ; Rue, Bertrand ; Pardoen, Thomas ; Flandre, Denis ; Raskin, Jean-Pierre. A novel approach for active pressure sensors in thin film SOI technology.International conference Eurosensors XXV (Athènes (Grèce), du 04/09/2011 au 07/09/2011). In: Proceedings of the International conference Eurosensors XXV, 2011
Permanent URL http://hdl.handle.net/2078.1/106333