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In situ measurement of the internal stress evolution during sputter deposition of ZnO:Al

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Bibliographic reference Michotte, Sébastien ; Proost, Joris. In situ measurement of the internal stress evolution during sputter deposition of ZnO:Al. In: Solar Energy Materials & Solar Cells, Vol. 98, p. 253-259 (2012)
Permanent URL http://hdl.handle.net/2078.1/105128