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Advances in Electrochemical Micromachining of Silicon:Towards MEMS Fabrication

Onglets principaux

Bassu, Margherita [UCL] Strambini, Lucanos Marsilio [Universiti di Pisa, Italy] Barillaro, Giuseppe [Universiti di Pisa, Italy]

In this work, a significant step towards the fabrication of very high aspect-ratio complex microsystems by silicon electrochemical micromachining in HF-based electrolytes (ECM) is given. High aspect-ratio MEMS structures, with different shape and dimensions, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology.

Type de document Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection
Année de publication 2011
Langue Anglais
Conférence "Proceedings of EUROSENSORS XXV", Athènes (Grèce) (du 04/09/2011 au 07/09/2011)
Peer reviewed oui
Affiliations UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique
Universiti di Pisa, Italy - Dipt. di Ingegneria dell'Informazione
Mots-clés MEMS ; Silicon micromachining ; Electrochemical etching
Liens
Référence bibliographique Bassu, Margherita ; Strambini, Lucanos Marsilio ; Barillaro, Giuseppe. Advances in Electrochemical Micromachining of Silicon:Towards MEMS Fabrication.Proceedings of EUROSENSORS XXV (Athènes (Grèce), du 04/09/2011 au 07/09/2011).
Permalien http://hdl.handle.net/2078.1/87767