A contactless and nondestructive technique is employed for characterizing single-sided metallised silicon wafers. The reflection spectra are measured using a quasi-optical millmeter-wave setup in the frequency range 40–320 GHz. The results are compared with those provided by the coplanar waveguide method, in terms of accuracy and range of applicability
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Elhawil, A. ; Roda Neve, Cesar ; Olbrechts, Benoit ; Huynen, Isabelle ; Raskin, Jean-Pierre ; et. al. Contactless monitoring of Si substrate permittivity and resistivity from microwave to millimeter-wave frequencies. In: Microwave & Optical Technology Letters, Vol. 52, no. 11, pp. 2500-2505 (November 2010)