Rbs Study of the Effect of Arsenic and Phosphorus Interfacial Segregation Upon the Sintering of Contacts Between Implanted Polycrystalline Silicon and Aluminum-silicon(1-percent)

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Onglets principaux

Herbots, N. Lobet, M. Vandewiele, F.

Type de document	Article de périodique (Journal article) – Article de recherche
Type d'accès	Accès restreint
Année de publication	1985
Langue	Anglais
Information sur le périodique	"Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms" - Vol. 7-8, no. MAR, p. 278-286 (1985)
Peer reviewed	oui
Editeur	Elsevier Science Bv (Amsterdam)
issn	0168-583X
e-issn	1872-9584
Statut de la publication	Publié
Affiliations	UCL
Liens	https://doi.org/10.1016/0168-583X(85)90566-X[DOI] http://hdl.handle.net/2078.1/55320[Handle]

Référence bibliographique	Herbots, N. ; Lobet, M. ; Vandewiele, F.. Rbs Study of the Effect of Arsenic and Phosphorus Interfacial Segregation Upon the Sintering of Contacts Between Implanted Polycrystalline Silicon and Aluminum-silicon(1-percent). In: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 7-8, no. MAR, p. 278-286 (1985)
Permalien	http://hdl.handle.net/2078.1/55320