User menu

Accès à distance ? S'identifier sur le proxy UCLouvain

Search

Displaying 13 results.
    • Speech
    Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications
    Van der Donck, T. Proost, Joris[UCL] Baert, K. Van Hoof, C. Witvrouw, A. (2004) the SPIE Conference on Micromachining and Microfabrication Process Technology — San Francisco - CA
    • Journal article
    Electromigration-induced drift in damascene vs. plasma-etched Al(Cu). Part I : Kinetics of Cu-depletion in polycrystalline interconnects
    Proost, Joris[UCL] Witvrouw, A. Cosemans, P. D'Haen, J. Maex, K. (2000) Journal of Applied Physics — Vol. 87, no. 1, p. 86-98 (2000)
    • Speech
    Electromigration-induced drift in damascene vs. conventional interconnects : an intrinsic difference
    Proost, Joris[UCL] Samajdar, I. Witvrouw, A. Maex, K. (1998) the Materials Research Society Symposium — San Francisco - CA
    • Speech
    Ultra-Narrow, High Aspect Ratio Trenches for Use in Miniaturized Poly-Sige Accelerometers
    Ray Chaudhuri, Ashesh[UCL] Helin, P. Severi, S. Van Hoof, R. Du Bois, B. Tilmans, H. Francis, Laurent[UCL] Witvrouw, A. (2013) 224th ECS Meeting — San Francisco (USA)
    • Speech
    Effect of Cu on Al interfacial mass transport in bamboo RIE and damascene Al(Cu)
    Proost, Joris[UCL] Li, H. Witvrouw, A. Maex, K. (1999) Materials Research Society Symposium — San Francisco - CA
    • Speech
    Design of a Miniaturized Accelerometer with 200 nm Capacitive Sensing Gap
    Ray Chaudhuri, Ashesh[UCL] Severi, S. Erismis, M.A. Francis, Laurent[UCL] Witvrouw, A. (2011) ICT.Open Conference — Veldhoven (the Netherlands)
    • Speech
    Electromigration behaviour of 0.3 µm damascene vs. plasma-etched interconnects : a lifetime and drift analysis
    Proost, Joris[UCL] Li, H. Brijs, B. Witvrouw, A. Maex, K. (1998) the IEEE International Interconnect Technology Conference — San Francisco - CA
    • Journal article
    Study of Cu diffusion in an Al(1wt% Si, 0.5wt% Cu) bond pad with an Al(1wt.% Si) bond wire attached
    Cosemans, P. D'Haen, J. Witvrouw, A. Proost, Joris[UCL] D'Olieslaeger, M. De Ceuninck, W. Maex, K. De Schepper, L. (1998) Microelectronics Reliability — Vol. 38, no. 3, p. 309-315 (1998)
    • Speech
    SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity
    Ray Chaudhuri, Ashesh[UCL] Severi, S. Erismis, M/Akif Francis, Laurent[UCL] Witvrouw, A. (2012) 26th European Conference on Solid-State Transducers (Eurosensors 2012) — Krakow (Poland)
    • Speech
    Incubation, time-dependent drift and saturation during Al-Si-Cu electromigration : modeling and implications for design
    Witvrouw, A. Roussel, Ph. Beyer, G. Proost, Joris[UCL] Maex, K. (1998) the IEEE International Interconnect Technology Conference —
    • Journal article
    Stress relaxation in Al(Cu) thin films
    Proost, Joris[UCL] Witvrouw, A. Cosemans, P. Roussel, Ph. Maex, K. (1997) Microelectronic Engineering — Vol. 33, no. 1-4, p. 137-147 (1997)
    • Journal article
    Stress relaxation in Al-Cu and Al-Si-Cu thin films
    Witvrouw, A. Proost, Joris[UCL] Roussel, Ph. Cosemans, P. Maex, K. (1999) Journal of Materials Research — Vol. 14, no.4, p. 1246-1254 (1999)
    • Speech
    CMOS integrated poly-sigemems accelerometer above 0.18 µm technology
    Ray Chaudhuri, Ashesh[UCL] Helin, P. van den Hoven, R. Severi, S. Rottenberg, X. Yazicioglu, R.F. Witvrouw, A. Francis, Laurent[UCL] Tilmans, H.A.C. (2015) 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) — Anchorage (USA)