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Displaying 14 results.
    • Speech
    Effect of Cu on Al interfacial mass transport in bamboo RIE and damascene Al(Cu)
    Proost, Joris[UCL] Li, H. Witvrouw, A. Maex, K. (1999) Materials Research Society Symposium — San Francisco - CA
    • Speech
    SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity
    Ray Chaudhuri, Ashesh[UCL] Severi, S. Erismis, M/Akif Francis, Laurent[UCL] Witvrouw, A. (2012) 26th European Conference on Solid-State Transducers (Eurosensors 2012) — Krakow (Poland)
    • Speech
    Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications
    Van der Donck, T. Proost, Joris[UCL] Baert, K. Van Hoof, C. Witvrouw, A. (2004) the SPIE Conference on Micromachining and Microfabrication Process Technology — San Francisco - CA
    • Speech
    Electromigration behaviour of 0.3 µm damascene vs. plasma-etched interconnects : a lifetime and drift analysis
    Proost, Joris[UCL] Li, H. Brijs, B. Witvrouw, A. Maex, K. (1998) the IEEE International Interconnect Technology Conference — San Francisco - CA
    • Journal article
    Stress relaxation in Al(Cu) thin films
    Proost, Joris[UCL] Witvrouw, A. Cosemans, P. Roussel, Ph. Maex, K. (1997) Microelectronic Engineering — Vol. 33, no. 1-4, p. 137-147 (1997)
    • Speech
    Stress relaxation in Al-Si-Cu thin films and lines
    Witvrouw, A. Proost, Joris[UCL] Deweerdt, B. Roussel, Ph. Maex, K. (1995) the Materials Research Society Symposium — Boston - MA
    • Journal article
    Stress relaxation in Al-Cu and Al-Si-Cu thin films
    Witvrouw, A. Proost, Joris[UCL] Roussel, Ph. Cosemans, P. Maex, K. (1999) Journal of Materials Research — Vol. 14, no.4, p. 1246-1254 (1999)
    • Speech
    CMOS integrated poly-sigemems accelerometer above 0.18 µm technology
    Ray Chaudhuri, Ashesh[UCL] Helin, P. van den Hoven, R. Severi, S. Rottenberg, X. Yazicioglu, R.F. Witvrouw, A. Francis, Laurent[UCL] Tilmans, H.A.C. (2015) 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) — Anchorage (USA)