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    The fracture of polycrystalline silicon based MEMS
    Wang, X.[UCL] Becker, G.[UCL] Ling, Wu[UCL] Pardoen, Thomas[UCL] Raskin, Jean-Pierre[UCL] Noels, L. (2012) 13th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE 2012 — Lisbon, Portugal