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Displaying 9 results.
    • Speech
    A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators
    Dancila, Dragos[UCL] Ekkels, P. Rottenberg, X. Huynen, Isabelle[UCL] De Raedt, W. Tilmans, H.A.C. (2010) 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) — Wanchai, Hong Kong, China
    • Speech
    Challenges of monolithic integration for SiGe MEMS technology
    Ray Chaudhuri, Ashesh Severi, S. Helin, P. Francis, Laurent[UCL] Tilmans, H.A.C. (2017) 15th IEEE Sensors Conference, SENSORS 2016 — Orlando (United States)
    • Speech
    CMOS integrated poly-sigemems accelerometer above 0.18 µm technology
    Ray Chaudhuri, Ashesh[UCL] Helin, P. van den Hoven, R. Severi, S. Rottenberg, X. Yazicioglu, R.F. Witvrouw, A. Francis, Laurent[UCL] Tilmans, H.A.C. (2015) 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) — Anchorage (USA)