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    CMOS integrated poly-sigemems accelerometer above 0.18 µm technology
    Ray Chaudhuri, Ashesh[UCL] Helin, P. van den Hoven, R. Severi, S. Rottenberg, X. Yazicioglu, R.F. Witvrouw, A. Francis, Laurent[UCL] Tilmans, H.A.C. (2015) 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) — Anchorage (USA)