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    A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators
    Dancila, Dragos[UCL] Ekkels, P. Rottenberg, X. Huynen, Isabelle[UCL] De Raedt, W. Tilmans, H.A.C. (2010) 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) — Wanchai, Hong Kong, China