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Displaying 3 results.
    • Speech
    3-D CMOS compatible MEMS sensors and actuators
    André, Nicolas[UCL] Sobieski, Stanislas[UCL] Renaux, Christian[UCL] Flandre, Denis[UCL] Raskin, Jean-Pierre[UCL] (2008) Workshop on MEMS and Nanotechnology through Science and Applications — UCL/Louvain-la-Neuve (Belgium)
    • Speech
    3-D capacitive MEMS sensors co-integrated with SOI CMOS circuits
    André, Nicolas[UCL] Rue, Bertrand[UCL] Renaux, Christian[UCL] Flandre, Denis[UCL] Raskin, Jean-Pierre[UCL] (2008) Fourth Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits (EUROSOI 2008) — Tyndall National Institute, Cork (Ireland)
    • Speech
    Artificial microbeams to sense air flow, temperature or humidity combining MEMS and CMOS technologies
    André, Nicolas[UCL] Rue, Bertrand[UCL] Renaux, Christian[UCL] Raskin, Jean-Pierre[UCL] Flandre, Denis[UCL] (2008) Sensors and Sensing in Biology and Engineering Conference, October 12 – 16, 2008 — Cetraro (Italy)